Indian Journal of Science and Technology

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In this paper, we present an overview of silicon nanocrystals memories. Silicon nanocrystals are as storage nodes in these memories. These devices show promising characteristics as candidates for future deep-submicron non-volatile memories. The structure and fabrication of these devices are explained at first. Then the size, density, and emission of silicon nanocrystals in nanocrystal memory device are considered. Finally, a FinFET silicon nanocrystal memory is introduced as a practical sample.

Keywords

Silicon Nanocrystal, Memory, Storage, FinFET
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