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The Effect of Deposition Parameters on the Sensing Behaviors of the SnO2: Cu Nano-structure Thin Films Including Co2-gas Sensor


Affiliations
1 Physics Department, Ferdowsi University of Mashhad, Mashhad, Iran, Islamic Republic of
 

In this work, Cu-doped SnO2 thin films were deposited by spray pyrolysis method. The films were prepared using SnCl4 ,5H2O and CuCl2,2H2O hydro-alcoholic solution. Then, the sensitivity parameter of SnO2-based CO2-gas sensors is studied for various atomic percentages ([Cu]/[Sn] = 0, 2, 4, 6, 10,12.5,15, 20, 25). In addition, the effect of substrate temperature on the sensing behavior of films was also studied. The XRD and SEM structural analysis of thin film sensors confirm the nano-structure of the films with SnO2 cassiterite phase. The optical band gap of Cu doped- SnO2 films were obtained from optical absorption spectra by UV-Vis absorption spectroscopy. Measurement of the electrical resistivity of films shows that with increasing of Cu-doping in films up to 12.5%, the electrical resistivity increase sharply.

Keywords

Thin Film, Gas-sensors, Metal-oxide, Tin-oxide, Nanostructure
User

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  • The Effect of Deposition Parameters on the Sensing Behaviors of the SnO2: Cu Nano-structure Thin Films Including Co2-gas Sensor

Abstract Views: 425  |  PDF Views: 104

Authors

H. Rezvani
Physics Department, Ferdowsi University of Mashhad, Mashhad, Iran, Islamic Republic of
N. Shahtahmasebi
Physics Department, Ferdowsi University of Mashhad, Mashhad, Iran, Islamic Republic of
M. Rezaee Rokn-Abadi
Physics Department, Ferdowsi University of Mashhad, Mashhad, Iran, Islamic Republic of
H. Arabshahi
Physics Department, Ferdowsi University of Mashhad, Mashhad, Iran, Islamic Republic of

Abstract


In this work, Cu-doped SnO2 thin films were deposited by spray pyrolysis method. The films were prepared using SnCl4 ,5H2O and CuCl2,2H2O hydro-alcoholic solution. Then, the sensitivity parameter of SnO2-based CO2-gas sensors is studied for various atomic percentages ([Cu]/[Sn] = 0, 2, 4, 6, 10,12.5,15, 20, 25). In addition, the effect of substrate temperature on the sensing behavior of films was also studied. The XRD and SEM structural analysis of thin film sensors confirm the nano-structure of the films with SnO2 cassiterite phase. The optical band gap of Cu doped- SnO2 films were obtained from optical absorption spectra by UV-Vis absorption spectroscopy. Measurement of the electrical resistivity of films shows that with increasing of Cu-doping in films up to 12.5%, the electrical resistivity increase sharply.

Keywords


Thin Film, Gas-sensors, Metal-oxide, Tin-oxide, Nanostructure

References





DOI: https://doi.org/10.17485/ijst%2F2010%2Fv3i6%2F29769