Author Details

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z All


Author Finder  

Komanduri, Ranga


  • On the Identification of Physical Sources of Vibration Sensor Signal Patterns in Chemical Mechanical Planarization (CMP) Process

  • Sensor Based Modeling and Monitoring of Surface Quality in a Lapping Process Using a Nonlinear Stochastic Model