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Authors
Affiliations
1 Dept of Electronics Engineering, VNIT, Nagpur, IN
Source
Manufacturing Technology Today, Vol 14, No 3 (2015), Pagination: 8-11
Abstract
In this paper we have studied different methods of fabrication of microchannels on silicon substrate for microfluidics application. The paper discusses two etching methods as Reactive Ion Etching (RIE) and Tetra Methyl Ammonium Hydroxide (TMAH). The current study investigates effects of RIE parameters on etching.
Keywords
Microfabrication, Reactive Ion Etching, Tetra Methyl Ammonium Hydroxide.