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Darukesha, B. H. M.
- Two-Side Pattern Generation Using Direct Lithography System
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Authors
Rashmi Behera
1,
Ankita
1,
Srinivasarao Bollu
1,
B. H. M. Darukesha
1,
V. Venkatesh
1,
M. Ravindra
1
Affiliations
1 Indigenisation & Components Group, ISRO Satellite Centre, Bangalore - 560017, IN
1 Indigenisation & Components Group, ISRO Satellite Centre, Bangalore - 560017, IN