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Features of MEMS


Affiliations
1 Department of ECE, Sathyabama University, Chennai, India
2 Department of ECE, Dr. MGR Educational and Research Institute University, Chennai, India
     

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MEMS - Micro electro mechanical systems. It refers to machines with moving components smaller than a human hair that contain each electrical and mechanical parts. MEMS. Additionally referred to as Microsystems, microstructures, microstructure technology (MST) and mechatronics. Micro electro mechanical Systems (MEMS) have gained acceptance as viable merchandise for several commercial and government applications. This paper offers a Short review of history and components of MEMS. This paper also discusses current and future MEMS applications. It then gives the fabrication processes of MEMS. Additional this paper discusses regarding the MEMS achievements, challenges and needs. Next it discusses the long run type of MEMS. Lastly it concludes location that MEMS have enough potential to ascertain a second technological revolution of shrinking which will produce associate degree business that exceeds the IC business in each size and impact on society.


Keywords

MEMS.
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  • Features of MEMS

Abstract Views: 161  |  PDF Views: 2

Authors

S. Krishnaveni
Department of ECE, Sathyabama University, Chennai, India
S. Ravi
Department of ECE, Dr. MGR Educational and Research Institute University, Chennai, India

Abstract


MEMS - Micro electro mechanical systems. It refers to machines with moving components smaller than a human hair that contain each electrical and mechanical parts. MEMS. Additionally referred to as Microsystems, microstructures, microstructure technology (MST) and mechatronics. Micro electro mechanical Systems (MEMS) have gained acceptance as viable merchandise for several commercial and government applications. This paper offers a Short review of history and components of MEMS. This paper also discusses current and future MEMS applications. It then gives the fabrication processes of MEMS. Additional this paper discusses regarding the MEMS achievements, challenges and needs. Next it discusses the long run type of MEMS. Lastly it concludes location that MEMS have enough potential to ascertain a second technological revolution of shrinking which will produce associate degree business that exceeds the IC business in each size and impact on society.


Keywords


MEMS.