Informatics Publishing Limited

T. Sreenivasulu ¹, Venkateswara Rao Kolli ¹, T. R. Yadunath ¹, T. Badrinarayana ¹, Amaresh Sahu ¹, Gopalkrishna Hegde ², S. Mohan ², T. Srinivas ¹

Affiliations
1 Department of Electrical Communication Engineering, Indian Institute of Science, Bengaluru 560 012, IN
2 Centre for Nano Science and Engineering, Indian Institute of Science, Bengaluru 560 012, IN

Abstract

A photonic crystal-based force sensor to measure forces in the wide range 100 nN-10 μN is proposed here. An optimized photonic crystal resonator integrated on top of a Si/SiO₂ bilayer cantilever, is used as the sensing device. A sensitivity of 0.1 nm for a force of 100 nN is obtained with a high-quality factor of 10,000. The sensor characteristics in the force ranges 0-1 μN and 0-10 μN are also presented here. Linear wavelength shift and constant quality factor are observed in the entire studied force range.

Keywords

Cantilever Beam, Force Sensing, Optical Sensors, Photonic Crystal Resonator.

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