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Dass, Megha
- Experimental Analysis of Conformality of E–Beam Deposited Thin Films for Mems Applications
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1 MEMS Fabrication Division, Semi-Conductor Laboratory Mohali, IN
2 Indian Institute of Technology, Kanpur, IN
1 MEMS Fabrication Division, Semi-Conductor Laboratory Mohali, IN
2 Indian Institute of Technology, Kanpur, IN