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Influence of Fabrication Processes on Transport Properties of Superconducting Niobium Nitride Nanowires


Affiliations
1 Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India
2 Microelectronics Research Laboratory, Department of Engineering Physics, Delhi Technological University, Bawana Road, Delhi 110 042, India
3 Department of Condensed Matter Physics and Materials Science, Tata Institute of Fundamental Research, Homi Bhabha Road, Mumbai 400 005, India
 

Fabrication of niobium nitride (NbN) superconducting nanowires based on focused ion beam (FIB) milling and electron beam lithography (EBL) is presented. The NbN films were deposited using reactive magnetron sputtering. Argon-to-nitrogen ratio turned out to be a crucial factor in synthesizing high quality superconducting NbN. Critical temperatures (Tc) of around 15.5 K were measured for films with a thickness of around 10 nm. Zero-field-cooled magnetization was measured to optimize the superconducting properties of ultra thin NbN films. The transport behaviour was studied using conventional resistance vs temperature and current-voltage characteristics down to 2 K. Effect of gallium contamination on superconducting properties has been discussed. Whereas the various processing steps of standard EBL route do not have any significant impact on the superconducting transition temperature as well as on the transition width of nanowires, there is significant degradation of superconducting properties of nanowires prepared using FIB. This has been attributed to gallium ion implantation across the superconducting channel. Although the effect of gallium implantation may have technological limitations in designing fascinating single photon detector architectures, it provides some interesting low-dimensional superconducting properties.

Keywords

DC Magnetron Sputtering, EBL, FIB, Niobium Nitride, Superconducting Nanostructure, Thin Films.
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  • Gol’tsman, G. N. et al., Picosecond superconducting single-photon optical detector. Appl. Phys. Lett., 2001, 79, 705–707.

  • Takesue, H., Nam, S. W., Zhang, Q., Hadfield, R. H., Honjo, T., Tamaki, K. and Yamamoto, Y., Quantum key distribution over a 40-dB channel loss using superconducting single-photon detectors. Nat. Photon., 2007, 1, 343–348.

  • Hadfield, R. H., Single-photon detectors for optical quantum information applications. Nat. Photon., 2009, 3, 696–705 and references therein.

  • Rosenberg, D. et al., Practical long-distance quantum key distribution system using decoy levels. New J. Phys., 2009, 11, 045009(1–10).

  • Stucki, D. et al., High rate, long-distance quantum key distribution over 250 km of ultra low loss fibres. New J. Phys., 2009, 11, 075003(1–9).

  • Liu, Y. et al., Decoy-state quantum key distribution with polarized photons over 200 km. Opt. Express, 2010, 18, 8587–8594.

  • Eisaman, M. D., Fan, J., Migdal, A. and Polyakov, S. V., Invited review article: single-photon sources and detectors. Rev. Sci. Instrum., 2011, 82, 071101(1–25) and references therein.

  • Natarajan, C. M., Tanner, M. G. and Hadfield, R. H., Superconducting nanowire single-photon detectors: physics and applications. Supercond. Sci. Tech., 2012, 25, 063001(1–16) and references therein.

  • Wang, S. et al., 2 GHz clock quantum key distribution over 260 km of standard telecom fiber. Opt. Lett., 2012, 37, 1008–1010.

  • Yao, X.-C. et al., Experimental demonstration of topological error correction. Nature, 2012, 482, 489–494.

  • Ma, X.-S. et al., Quantum teleportation over 143 kilometres using active feed-forward. Nature, 2012, 489, 269–273.

  • Pan, J.-W., Chen, Z.-B., Lu, C.-Y., Weinfurter, H., Zeilinger, A. and Zukowski, M., Multiphoton entanglement and interferometry. Rev. Mod. Phys., 2012, 84, 777–838.

  • Shimizu, K. et al., Performance of long-distance quantum key distribution over 90-km optical links installed in a field environment of Tokyo metropolitan area. J. Lightwave Technol., 2014, 32, 141–151.

  • Northup, T. E. and Blatt, R., Quantum information transfer using photons. Nat. Photon., 2014, 8, 356–363.

  • Korzh, B. et al., Provably secure and practical quantum key distribution over 307 km of optical fibre. Nat. Photon., 2014, 9, 163–168.

  • Takesue, H., Dyer, S. D., Stevens, M. J., Verma, V., Mirin, R. P. and Nam, S. W., Quantum teleportation over 100 km of fiber using highly efficient superconducting nanowire single-photon detectors. Optica, 2015, 2, 832–835.

  • Engel, A., Renema, J. J., Il’in, K. and Semenov, A., Detection mechanism of superconducting nanowire single-photon detectors. Supercond. Sci. Tech., 2015, 28, 114003(1–22) and references therein.

  • Chunnilall, C. J., Degiovanni, I. P., Kuck, S., Muller, I. and Sinclair, A. G., Metrology of single-photon sources and detectors: a review. Opt. Eng., 2014, 53, 081910(1–17).

  • Lita, A. E., Miller, A. J. and Nam, S. W., Counting near-infrared single-photons with 95% efficiency. Opt. Express, 2008, 16, 3032–3040.

  • Miki, S. et al., Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates. Appl. Phys. Lett., 2008, 92, 061116(1–3).

  • Korneev, A. et al., Recent nanowire superconducting single-photon detector optimization for practical applications. IEEE Trans. Appl. Supercond., 2013, 23, 2201204(1–4).

  • Bergeal, N., Grison, X., Lesueur, J., Faini, G., Aprili, M. and Contour, J.-P., High Tc superconducting quantum interference devices made by ion irradiation. Appl. Phys. Lett., 2006, 89, 112515(1–3).

  • Delacour, C. et al., Superconducting single photon detectors made by local oxidation with an atomic force microscope. Appl. Phys. Lett., 2007, 90, 191116(1–3).

  • Lee, S.-G., Oh, S., Kang, C. S. and Kim, S.-J., Superconducting nanobridge made from YBa2Cu3O7 film by using focused ion beam. Phys. C Supercond., 2007, 460, 1468–1469.

  • Curtz, N., Koller, E., Zbinden, H., Decroux, M., Antognazza, L., Fischer, Ø. and Gisin, N., Patterning of ultrathin YBCO nanowires using a new focused-ion-beam process. Supercond. Sci. Technol. 2010, 23, 045015(1–6).

  • Zhang, C. et al., Fabrication of superconducting nanowires from ultrathin MgB2 films via focused ion beam milling. AIP Adv., 2015, 5, 027139(1–8).

  • Bachar, G., Baskin, I., Shtempluck, O. and Buks, E., Superconducting nanowire single photon detectors on-fiber. Appl. Phys. Lett., 2012, 101, 262601(1–3).

  • Datesman, A. M., Schultz, J. C., Cecil, T. W., Lyons, C. M. and Lichtenberger, A. W., Gallium ion implantation into niobium thin films using a focused-ion beam. IEEE Trans. Appl. Supercond., 2005, 15, 3524–3527.

  • Lehrer, C., Frey, L., Petersen, S., Mizutani, M., Takai, M. and Ryssel, H., Defects and gallium-contamination during focused ion beam micro machining. In Proceedings of IEEE Ion Implantation Technology, 2000, pp. 695–698.

  • Mayer, J., Giannuzzi, L. A., Kamino, T. and Michael, J., TEM sample preparation and FIB induced damage. MRS Bull., 2007, 32, 400–407.

  • Venkataraj, S., Drese, R., Liesch, Ch., Kappertz, O., Jayavel, R. and Wuttig, M., Temperature stability of sputtered niobium-oxide films. J. Appl. Phys. 2002, 91, 4863–4871.

  • Ziegler, M., Fritzsch, L., Day, J., Linzen, S., Anders, S., Toussaint, J. and Meyer, H.-G., Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition. Supercond. Sci. Technol., 2013, 26, 025008(1–5).

  • Thakoor, S., Lamb, J. L., Thakoor, A. P. and Khanna, S. K., High Tc superconducting NbN films deposited at room temperature. J. Appl. Phys., 1985, 58, 4643–4648.

  • Wang, Z., Kawakami, A., Uzawa, Y. and Komiyamaa, B., Superconducting properties and crystal structures of single-crystal niobium nitride thin films deposited at ambient substrate temperature. J. Appl. Phys., 1996, 79, 7837–7842.

  • Ilin, K. et al., Ultra-thin NbN films on Si: crystalline and superconducting properties. J. Phys.: Conf. Ser., 2008, 97, 012045(1–6).

  • Chockalingam, S. P., Chand, M., Jesudasan, J., Tripathi, V. and Raychaudhuri, P., Superconducting properties and Hall effect of epitaxial NbN thin films. Phys. Rev. B Condens. Matter, 2008, 77, 214503(1–8).

  • Fominov, Y. V. and Feigel’man, M. V., Superconductive properties of thin dirty superconductor–normal-metal bilayers. Phys. Rev. B Condens. Matter, 2001, 63, 094518(1–14).

  • Litombe, N. E., Bollinger, A. T., Hoffman, J. E. and Bozovic, I., La2–xSrxCuO4 superconductor nanowire devices. Phys. C Supercond., 2014, 506, 169–173.

  • Elmurodov, A. K. et al., Phase-slip phenomena in NbN superconducting nanowires with leads. Phys. Rev. B Condens. Matter, 2008, 78, 214519(1–5).

  • Delacour, C., Pannetier, B., Villegier, J.-C. and Bouchiat, V., Quantum and thermal phase slips in superconducting niobium nitride (NbN) ultrathin crystalline nanowire: application to single photon detection. Nano Lett., 2012, 12, 3501–3506.


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  • Influence of Fabrication Processes on Transport Properties of Superconducting Niobium Nitride Nanowires

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Authors

Manju Singh
Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India
Rishu Chaujar
Microelectronics Research Laboratory, Department of Engineering Physics, Delhi Technological University, Bawana Road, Delhi 110 042, India
Sudhir Husale
Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India
S. Grover
Department of Condensed Matter Physics and Materials Science, Tata Institute of Fundamental Research, Homi Bhabha Road, Mumbai 400 005, India
Amit P. Shah
Department of Condensed Matter Physics and Materials Science, Tata Institute of Fundamental Research, Homi Bhabha Road, Mumbai 400 005, India
Mandar M. Deshmukh
Department of Condensed Matter Physics and Materials Science, Tata Institute of Fundamental Research, Homi Bhabha Road, Mumbai 400 005, India
Anurag Gupta
Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India
V. N. Singh
Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India
V. N. Ojha
Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India
D. K. Aswal
Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India
R. K. Rakshit
Academy of Scientific and Innovative Research, CSIR-NPL Campus, Dr K.S. Krishnan Marg, New Delhi 110 012, India

Abstract


Fabrication of niobium nitride (NbN) superconducting nanowires based on focused ion beam (FIB) milling and electron beam lithography (EBL) is presented. The NbN films were deposited using reactive magnetron sputtering. Argon-to-nitrogen ratio turned out to be a crucial factor in synthesizing high quality superconducting NbN. Critical temperatures (Tc) of around 15.5 K were measured for films with a thickness of around 10 nm. Zero-field-cooled magnetization was measured to optimize the superconducting properties of ultra thin NbN films. The transport behaviour was studied using conventional resistance vs temperature and current-voltage characteristics down to 2 K. Effect of gallium contamination on superconducting properties has been discussed. Whereas the various processing steps of standard EBL route do not have any significant impact on the superconducting transition temperature as well as on the transition width of nanowires, there is significant degradation of superconducting properties of nanowires prepared using FIB. This has been attributed to gallium ion implantation across the superconducting channel. Although the effect of gallium implantation may have technological limitations in designing fascinating single photon detector architectures, it provides some interesting low-dimensional superconducting properties.

Keywords


DC Magnetron Sputtering, EBL, FIB, Niobium Nitride, Superconducting Nanostructure, Thin Films.

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DOI: https://doi.org/10.18520/cs%2Fv114%2Fi07%2F1443-1450